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Proceedings Paper

Lithography applications of the new Tencor Surfscan AIT laser-based defect inspection system
Author(s): Ian Preston Lincoln; Rebecca S. Howland; Keith B. Wells
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Paper Details

Date Published: 21 May 1996
PDF: 4 pages
Proc. SPIE 2725, Metrology, Inspection, and Process Control for Microlithography X, (21 May 1996); doi: 10.1117/12.240123
Show Author Affiliations
Ian Preston Lincoln, Tencor Instruments (United States)
Rebecca S. Howland, Tencor Instruments (United States)
Keith B. Wells, Tencor Instruments (United States)


Published in SPIE Proceedings Vol. 2725:
Metrology, Inspection, and Process Control for Microlithography X
Susan K. Jones, Editor(s)

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