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Proceedings Paper

Managing environmentally benign semiconductor manufacturing research
Author(s): Daniel J.C. Herr
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Paper Abstract

'Environment, Safety and Health, having made significant contributions in recent years, finds that future requirements mandate concurrent engineering efforts in developing future technology and ensuring ESH integrity.' (National Technology Roadmap for Semiconductors, 1994, p 3). This paper examines options which enable the production of high performance, robust, and green semiconductor manufacturing technologies. Examples include innovative solutions to critical gap areas that provide a more fundamental understanding of trade-offs between device performance and high-priority ESH issues.

Paper Details

Date Published: 21 May 1996
PDF: 7 pages
Proc. SPIE 2725, Metrology, Inspection, and Process Control for Microlithography X, (21 May 1996); doi: 10.1117/12.240089
Show Author Affiliations
Daniel J.C. Herr, Semiconductor Research Corp. (United States)


Published in SPIE Proceedings Vol. 2725:
Metrology, Inspection, and Process Control for Microlithography X
Susan K. Jones, Editor(s)

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