Share Email Print
cover

Proceedings Paper

Two-coordinate laser measuring system for scanning tunneling and atomic-force microscopes
Author(s): V. M. Khavinson; L. F. Khavinson
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The optical train and design of an automated two-coordinate laser polarization interferometer to measure linear displacements in the nanometer range are discussed. The interferometer can be used for two-coordinate measurements of displacements of the needle of scanning tunneling or atomic-force microscopes in the study of surface topology.

Paper Details

Date Published: 6 May 1996
PDF: 5 pages
Proc. SPIE 2799, Atomic and Quantum Optics: High-Precision Measurements, (6 May 1996); doi: 10.1117/12.239864
Show Author Affiliations
V. M. Khavinson, Mendeleev Institute for Metrology (Russia)
L. F. Khavinson, Mendeleev Institute for Metrology (Russia)


Published in SPIE Proceedings Vol. 2799:
Atomic and Quantum Optics: High-Precision Measurements
Sergei N. Bagayev; Anatoly S. Chirkin, Editor(s)

© SPIE. Terms of Use
Back to Top