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Proceedings Paper

Demonstration of a vapor-density monitoring system using UV radiation generated from waveguide quasi-phase-matched SHG waveguide devices
Author(s): Shirley A. Galanti; Leon Val Berzins; J. B. Brown; Robert S. Tamosaitis; Michael L. Bortz; Timothy Day; Martin M. Fejer; Weizhi Wang
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Paper Abstract

Many industrial application require non-intrusive diagnostics for process monitoring and control. One example is the physical vapor deposition of titanium alloys. In this paper we present a system based on laser absorption spectroscopy for monitoring titanium vapor. Appropriate transitions for monitoring high rate vaporization of titanium require extension of available IR diode technology to the UV. The heart of this vapor density monitoring system is the 390 nm radiation generated from quasi-phase matched interactions within periodically poled waveguides. In this paper, key system components of a UV laser absorption spectroscopy based system specific for titanium density monitoring are described. Analysis is presented showing the minimum power levels necessary from the ultraviolet laser source. Performance data for prototype systems using second harmonic generation waveguide technology is presented. Application of this technology to other alloy density monitoring systems is discussed.

Paper Details

Date Published: 10 May 1996
PDF: 14 pages
Proc. SPIE 2700, Nonlinear Frequency Generation and Conversion, (10 May 1996); doi: 10.1117/12.239665
Show Author Affiliations
Shirley A. Galanti, Lawrence Livermore National Lab. (United States)
Leon Val Berzins, Lawrence Livermore National Lab. (United States)
J. B. Brown, E.I. du Pont de Nemours & Co., Inc. (United States)
Robert S. Tamosaitis, E.I. du Pont de Nemours & Co., Inc. (United States)
Michael L. Bortz, Focused Research (United States)
Timothy Day, Focused Research (United States)
Martin M. Fejer, Stanford Univ. (United States)
Weizhi Wang, Stanford Univ. (United States)

Published in SPIE Proceedings Vol. 2700:
Nonlinear Frequency Generation and Conversion
Mool C. Gupta; William J. Kozlovsky; David C. MacPherson, Editor(s)

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