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Proceedings Paper

Progress in all-solid-state deep-ultraviolet coherent light sources
Author(s): Michio Oka; L. Y. Liu; Werner Wiechmann; Yasujiro Taguchi; Hiroyuki Wada; Tsutomu Okamoto; Hiroshi Suganuma; Shigeo R. Kubota
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Paper Abstract

High power deep ultraviolet (UV) radiation has attracted much attention in areas such as photo-lithography, micro fabrication, material processing and ultra high density optical disk mastering. We report progress in improving the quality of Czochralski-grown (beta) -BaB2O4 (BBO) which is essential for generating high average output power in the deep ultraviolet regime. We obtained 1.5 W of cw 266 nm output using an external resonant doubler, 1.3 W of 213 nm output from a flashlamp pumped Q-switched Nd:YAG laser and more than 0.4 W of 213 nm radiation from a commercial 6 W diode-pumped high repetition rate Q-switched Nd:YAG laser using our melt-grown BBO crystals for the nonlinear frequency conversion. Using the cw 266 nm output speckle-free 0.25 micrometers photolithography and micro-fabrication was demonstrated.

Paper Details

Date Published: 10 May 1996
PDF: 9 pages
Proc. SPIE 2700, Nonlinear Frequency Generation and Conversion, (10 May 1996); doi: 10.1117/12.239660
Show Author Affiliations
Michio Oka, Sony Corp. (Japan)
L. Y. Liu, Sony Corp. (Japan)
Werner Wiechmann, Sony Corp. (Japan)
Yasujiro Taguchi, Sony Corp. (Japan)
Hiroyuki Wada, Sony Corp. (Japan)
Tsutomu Okamoto, Sony Corp. (Japan)
Hiroshi Suganuma, Sony Corp. (Japan)
Shigeo R. Kubota, Sony Corp. (Japan)

Published in SPIE Proceedings Vol. 2700:
Nonlinear Frequency Generation and Conversion
Mool C. Gupta; William J. Kozlovsky; David C. MacPherson, Editor(s)

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