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Proceedings Paper

Sputter-deposited c-axis-oriented LiNbO3 thin films on silicon
Author(s): Songshen Tan; J. Zou; Daniel D. Stancil; Tuviah E. Schlesinger; Michele Migliuolo
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Paper Abstract

We report on the deposition of c-axis oriented LiNbO3 planar waveguides on silicon substrates. We have employed a combined SiO2/Si3N4 cladding layer to provide both optical confinement in the LiNbO3 as well as acting as a barrier layer to prevent Li diffusion into the SiO2. LiNbO3 films displaying exclusively the (006) reflection (no other orientations) in x-ray diffraction spectra have been produced. Post deposition rapid thermal annealing has been employed to improve the crystallinity of these films. Optical losses of about 18 dB/cm were measured for these films. We discuss the deposition conditions, the role of the silicon nitride in determining the LiNbO3 texture, as well as the performance of these layers as planar optical waveguides.

Paper Details

Date Published: 10 May 1996
PDF: 8 pages
Proc. SPIE 2700, Nonlinear Frequency Generation and Conversion, (10 May 1996); doi: 10.1117/12.239650
Show Author Affiliations
Songshen Tan, Carnegie Mellon Univ. (United States)
J. Zou, Carnegie Mellon Univ. (United States)
Daniel D. Stancil, Carnegie Mellon Univ. (United States)
Tuviah E. Schlesinger, Carnegie Mellon Univ. (United States)
Michele Migliuolo, Kurt J. Lesker Co. (United States)


Published in SPIE Proceedings Vol. 2700:
Nonlinear Frequency Generation and Conversion
Mool C. Gupta; William J. Kozlovsky; David C. MacPherson, Editor(s)

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