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Proceedings Paper

Design and optimization of batch-fabricated rotative piezomotors
Author(s): Patrice Le Moal; Patrice Minotti; Antoine Ferreira; P. Cusin
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Paper Abstract

The purpose of the present paper is to develop methods allowing the design and optimization of traveling wave type ultrasonic micrometers. These methods are based on both mechanical models. The first one concerns the contact mechanism and allows us to perform the analytical calculation of the contact rate and the pressure distribution at the stator-rotor interface for a given external preload. Then, these results are included in a second model describing the driving mechanism from kinematic considerations. Both models have been validated and applied to design and manufacture micrometers fabricated from watch-making technologies. The mechanical potentialities of such piezomotors have been confirmed. Finally, a concept for batch-fabricated piezoelectric micrometers is exposed and different induced problems are discussed as perspectives.

Paper Details

Date Published: 1 May 1996
PDF: 11 pages
Proc. SPIE 2717, Smart Structures and Materials 1996: Smart Structures and Integrated Systems, (1 May 1996); doi: 10.1117/12.239059
Show Author Affiliations
Patrice Le Moal, Institut des Microtechniques de Franche-Comte (France)
Patrice Minotti, Institut des Microtechniques de Franche-Comte (France)
Antoine Ferreira, Institut des Microtechniques de Franche-Comte (France)
P. Cusin, Institut des Microtechniques de Franche-Comte (France)


Published in SPIE Proceedings Vol. 2717:
Smart Structures and Materials 1996: Smart Structures and Integrated Systems
Inderjit Chopra, Editor(s)

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