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Proceedings Paper

Morphological characteristics of thin metal films
Author(s): Rudolf Hrach; Dusan Novotny; Stanislov Novak; Jaroslav Pavlik
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Paper Abstract

The initial stages of growth of thin metal films in both two-dimensions (discontinuous metal films on dielectric substrates) and three-dimensions (plasmachemically prepared composite films with metal islands located in the dielectric matrix) are studied by the combination of direct measurement and modeling. For the analysis of film photographs from transmission electron microscope and for the description of spatial distribution of objects the methods of mathematical morphology were used, the special attention being devoted to the covariance method. The interpretation of the derived characteristics and the extension of the analysis for composite films was performed by the computer experiment, while simulated micrographs with known distribution of objects were processed by the same morphological algorithms as experimental data.

Paper Details

Date Published: 8 April 1996
PDF: 4 pages
Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); doi: 10.1117/12.238197
Show Author Affiliations
Rudolf Hrach, Charles Univ. (Czech Republic)
Dusan Novotny, J.E. Purkyne Univ. (Czech Republic)
Stanislov Novak, J.E. Purkyne Univ. (Czech Republic)
Jaroslav Pavlik, J.E. Purkyne Univ. (Czech Republic)

Published in SPIE Proceedings Vol. 2780:
Metal/Nonmetal Microsystems: Physics, Technology, and Applications
Benedykt W. Licznerski; Andrzej Dziedzic, Editor(s)

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