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Proceedings Paper

Atomic force microscope investigations of topography, lateral force, and electrical properties of metal containing amorphous hydrogenated carbon thin films
Author(s): Piotr Kazimierski; Harald Lehmberg
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Paper Abstract

Amorphous, hydrogenated carbon thin films have been prepared in an rf supported plasma process including ferrocene as an organometallic. Differences in electrical conductivity and elastic modulus are suggested to be due to a modification of the carbonaceous matrix. For locally resolved measurements of the electrical conductivity an atomic force microscope working in the contact mode has been employed.

Paper Details

Date Published: 8 April 1996
PDF: 4 pages
Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); doi: 10.1117/12.238194
Show Author Affiliations
Piotr Kazimierski, Centrum Badan Molekularnych i Makromolekularnych (Poland)
Harald Lehmberg, Technische Hochschule Darmstadt (Germany)


Published in SPIE Proceedings Vol. 2780:
Metal/Nonmetal Microsystems: Physics, Technology, and Applications
Benedykt W. Licznerski; Andrzej Dziedzic, Editor(s)

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