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Proceedings Paper

Fabrication of silicon microtips
Author(s): Anna Gorecka-Drzazga; Jan Dziuban
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Paper Abstract

In the article, the results of investigation of the silicon microtips manufacturing process are presented. A two-stage technology of the microtips forming has been worked out. At the first stage, a single-micrometer high, suitably shaped precursor of the tip is done. Next, the process of its sharpening is performed, using the isotropic etching and thermal oxidation techniques. The arrays of the reproducible silicon microtips were fabricated.

Paper Details

Date Published: 8 April 1996
PDF: 4 pages
Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); doi: 10.1117/12.238193
Show Author Affiliations
Anna Gorecka-Drzazga, Technical Univ. of Wroclaw (Poland)
Jan Dziuban, Technical Univ. of Wroclaw (Poland)

Published in SPIE Proceedings Vol. 2780:
Metal/Nonmetal Microsystems: Physics, Technology, and Applications
Benedykt W. Licznerski; Andrzej Dziedzic, Editor(s)

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