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Proceedings Paper

Plasma polymer films for surface modification
Author(s): Hynek Biederman; Pavel Hlidek; Jan Jezek; Danka Slavinska; Joseph Zemek
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Paper Abstract

Plasma polymers were deposited on various surfaces using Ar/n-hexane/water working gas mixture. In most cases a test surface consisting from glass substrate coated by plasma polymer of Ar/n-hexane was used. It has been found that wettability of this test surface improves with the increased water concentration in a working gas mixture or with the increased power to the discharge. The increased concentration of polar groups was observed by FTIR absorption in the films stored in humid environment. Rate of the water absorption in dependence on power used for the film deposition is discussed.

Paper Details

Date Published: 8 April 1996
PDF: 4 pages
Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); doi: 10.1117/12.238169
Show Author Affiliations
Hynek Biederman, Charles Univ. (Czech Republic)
Pavel Hlidek, Charles Univ. (Czech Republic)
Jan Jezek, Charles Univ. (Czech Republic)
Danka Slavinska, Charles Univ. (Czech Republic)
Joseph Zemek, Institute of Physics (Czech Republic)

Published in SPIE Proceedings Vol. 2780:
Metal/Nonmetal Microsystems: Physics, Technology, and Applications
Benedykt W. Licznerski; Andrzej Dziedzic, Editor(s)

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