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Proceedings Paper

Screen-printed silicon solar cells with texturized and passivated emitter diffused from spin-on phosphorous source
Author(s): Tadeusz Zdanowicz; Marek Lipinski
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Paper Abstract

Spin-on phosphorus diffusion source has been used for emitter formation in silicon solar cells. It is shown that commercially available phosphorosilicamer emulsion used for that purpose can be easily modified by adding alcohol solution of P2O5 thus allowing us to obtain junctions with different dopant profiles for the same process conditions. SIMS curves have been taken for several samples and compared with theoretical simulation of diffusion profile showing that diffusion driven from spin-on source may strongly differ from that carried out from classic POCl3 source. Results of some experiments on emitter passivation by simple dry oxidation are also presented.

Paper Details

Date Published: 8 April 1996
PDF: 5 pages
Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); doi: 10.1117/12.238168
Show Author Affiliations
Tadeusz Zdanowicz, Technical Univ. of Wroclaw (Poland)
Marek Lipinski, Solar Energy Experimental Station (Poland)

Published in SPIE Proceedings Vol. 2780:
Metal/Nonmetal Microsystems: Physics, Technology, and Applications
Benedykt W. Licznerski; Andrzej Dziedzic, Editor(s)

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