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Proceedings Paper

Piezoelectric microsensors based on thin ferroelectric films
Author(s): Zygmunt Surowiak; Dionizy Czekaj; A. A. Bakirov; Vladimir P. Dudkevich
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Paper Abstract

On the basis of the thin films of BaTiO3 and LiNbO3 the piezoelectric isotropic and anisotropic sensors of dynamical deformation (SDD) have been constructed and investigated. It has been ascertained that the electrical signal of isotropic SDD is proportional to the sum of the main components of the relative deformation tensor of the surface of the sample whereas the anisotropic sensor signal depends on the angle (phi) between the sensor axis and the main axis of the deformation tensor of the sample. The stability of their parameters has been ascertained under repeated deformation of the sample surface and repeated heating/cooling.

Paper Details

Date Published: 8 April 1996
PDF: 4 pages
Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); doi: 10.1117/12.238167
Show Author Affiliations
Zygmunt Surowiak, Silesian Univ. (Poland)
Dionizy Czekaj, Silesian Univ. (Poland)
A. A. Bakirov, Rostov-on-Don State Univ. (Russia)
Vladimir P. Dudkevich, Rostov-on-Don State Univ. (Russia)

Published in SPIE Proceedings Vol. 2780:
Metal/Nonmetal Microsystems: Physics, Technology, and Applications
Benedykt W. Licznerski; Andrzej Dziedzic, Editor(s)

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