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Proceedings Paper

Influence of microstructure on electrical properties of discontinuous Mn films
Author(s): Piotr Bieganski; E. Dobierzewska-Mozrzymas; E. Pieciul; Jacek Wojcik
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Paper Abstract

Mn discontinuous films with different thicknesses d were evaporated onto quartz-glass substrates at different temperatures under vacuum conditions (p equals 10-8 Torr). The microstructures and crystallographic orientations were examined with high resolution electron microscope. On the basis of the diffraction patterns the contents of islands and their influence on the electrical properties were determined. The temperature dependencies of resistance R(T) were measured in vacuo in situ for the Mn films with different thicknesses. Making use of the measured data the activation energies of resistance E were calculated for the films with different thicknesses and for the films obtained under different evaporation conditions.

Paper Details

Date Published: 8 April 1996
PDF: 3 pages
Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); doi: 10.1117/12.238153
Show Author Affiliations
Piotr Bieganski, Technical Univ. of Wroclaw (Poland)
E. Dobierzewska-Mozrzymas, Technical Univ. of Wroclaw (Poland)
E. Pieciul, Technical Univ. of Wroclaw (Poland)
Jacek Wojcik, Technical Univ. of Wroclaw (Poland)

Published in SPIE Proceedings Vol. 2780:
Metal/Nonmetal Microsystems: Physics, Technology, and Applications
Benedykt W. Licznerski; Andrzej Dziedzic, Editor(s)

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