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Proceedings Paper

Equipment for investigation of electronic devices with voltage contrast technique in SEM
Author(s): Wlodzimierz Drzazga; G. Klubinski; W. Slowko
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Paper Abstract

Voltage contrast technique is very useful for semiconductor devices characterization but standard SEMs are not equipped with proper facilities. A simple voltage contrast detection unit based on an original design of the electron energy analyzer has been presented. The detachable unit enables us to display and measure the potential distribution on the surface of integrated circuit.

Paper Details

Date Published: 8 April 1996
PDF: 4 pages
Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); doi: 10.1117/12.238137
Show Author Affiliations
Wlodzimierz Drzazga, Technical Univ. of Wroclaw (Poland)
G. Klubinski, Technical Univ. of Wroclaw (Poland)
W. Slowko, Technical Univ. of Wroclaw (Poland)


Published in SPIE Proceedings Vol. 2780:
Metal/Nonmetal Microsystems: Physics, Technology, and Applications
Benedykt W. Licznerski; Andrzej Dziedzic, Editor(s)

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