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Proceedings Paper

Aging of metal/hard-carbon films
Author(s): Hynek Biederman; Pavel Hlidek; Josef Pesicka; Danka Slavinska; Virgilijus Stundzia; Joseph Zemek
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Paper Abstract

Unbalanced electromagnetron operated in Ar/n-hexane mixture was employed for deposition of composite Ag/C:H films. For comparison composite Ni/C:H films were prepared in a similar way using unbalanced planar magnetron with permanent magnets. Optical transmission measurements, TEM micrographs, and dc electrical measurements, were used to study ageing effects of the composites in the ambient atmosphere.

Paper Details

Date Published: 8 April 1996
PDF: 3 pages
Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); doi: 10.1117/12.238131
Show Author Affiliations
Hynek Biederman, Charles Univ. (Czech Republic)
Pavel Hlidek, Charles Univ. (Czech Republic)
Josef Pesicka, Charles Univ. (Czech Republic)
Danka Slavinska, Charles Univ. (Czech Republic)
Virgilijus Stundzia, Charles Univ. (Czech Republic)
Joseph Zemek, Institute of Physics (Czech Republic)


Published in SPIE Proceedings Vol. 2780:
Metal/Nonmetal Microsystems: Physics, Technology, and Applications
Benedykt W. Licznerski; Andrzej Dziedzic, Editor(s)

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