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Proceedings Paper

Laser maskless formation of submicrometer periodic relief gratings on AIIIBV semiconductor wafers by combination of holographic and surface electromagnetic wave generation methods
Author(s): Vladislav Ya. Panchenko; Alexander I. Khudobenko; Vladimir N. Seminogov
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Paper Abstract

The review of experimental investigations on maskless formation of submicron periodic relief structures on AIIIBV semiconductor surfaces (period d equals 230 - 800 nm), carried out in the Scientific Research Center for Technological Lasers of Russian Academy of Sciences during the last two years, is presented.

Paper Details

Date Published: 8 April 1996
PDF: 7 pages
Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); doi: 10.1117/12.237765
Show Author Affiliations
Vladislav Ya. Panchenko, Scientific Research Ctr. for Technological Lasers (Russia)
Alexander I. Khudobenko, Scientific Research Ctr. for Technological Lasers (Russia)
Vladimir N. Seminogov, Scientific Research Ctr. for Technological Lasers (Russia)


Published in SPIE Proceedings Vol. 2703:
Lasers as Tools for Manufacturing of Durable Goods and Microelectronics
Jan J. Dubowski; Jyotirmoy Mazumder; Leonard R. Migliore; Chandrasekhar Roychoudhuri; Ronald D. Schaeffer, Editor(s)

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