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Proceedings Paper

Maskless fabrication of submicrometer nonharmonic relief gratings for single-frequency DFB semiconductor lasers by three-beam holographic method
Author(s): Alexander I. Khudobenko; Vladislav Ya. Panchenko; Vladimir N. Seminogov
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Paper Abstract

Three-beam maskless holographic method for fabricating submicron nonharmonic relief structures with phase shift (pi) , which are capable of providing stable single-frequency oscillation at Bragg wavelength in semiconductor DFB lasers, is developed. To demonstrate the effectivity of this method the biharmonic structure with period d approximately equals 0.5 micrometers and quasisinusoidally modulated amplitude, possessing the phase shift (pi) , is fabricated on n-InP surface in the process of liquid-phase laser photoelectrochemical etching.

Paper Details

Date Published: 8 April 1996
PDF: 3 pages
Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); doi: 10.1117/12.237764
Show Author Affiliations
Alexander I. Khudobenko, Scientific Research Ctr. for Technological Lasers (Russia)
Vladislav Ya. Panchenko, Scientific Research Ctr. for Technological Lasers (Russia)
Vladimir N. Seminogov, Scientific Research Ctr. for Technological Lasers (Russia)


Published in SPIE Proceedings Vol. 2703:
Lasers as Tools for Manufacturing of Durable Goods and Microelectronics
Jan J. Dubowski; Jyotirmoy Mazumder; Leonard R. Migliore; Chandrasekhar Roychoudhuri; Ronald D. Schaeffer, Editor(s)

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