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Proceedings Paper

Laser planarization of chemical vapor deposited diamond film
Author(s): Ronald D. Schaeffer; Li Chen; Wen Ho
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Paper Abstract

Diamond films are grown by depositing carbon from gaseous species on prepared substrates. This process does not give surface uniformity, especially on the growth side where crystalline formations create very rough surfaces. In addition, there is usually an associated bow of the disc caused by strains in the material after removal from substrate. Since diamond is the hardest material, traditional grinding techniques, while fairly low cost, take an extremely long time. An extension of using lasers for cutting the material into usable shapes is to use lasers for the initial `flattening' procedure. This method has a significantly higher cost per hour, but usually requires much less time for equivalent volume removal. The use of lasers to remove bulk surface volume from CVDD and a few other materials will be discussed. Also, an extension of the fundamental concepts to automated manufacturing will be given.

Paper Details

Date Published: 8 April 1996
PDF: 14 pages
Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); doi: 10.1117/12.237736
Show Author Affiliations
Ronald D. Schaeffer, Resonetics, Inc. (United States)
Li Chen, Resonetics, Inc. (United States)
Wen Ho, Resonetics, Inc. (United States)

Published in SPIE Proceedings Vol. 2703:
Lasers as Tools for Manufacturing of Durable Goods and Microelectronics
Jan J. Dubowski; Jyotirmoy Mazumder; Leonard R. Migliore; Chandrasekhar Roychoudhuri; Ronald D. Schaeffer, Editor(s)

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