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Proceedings Paper

Field testing industrial and medical excimer laser systems
Author(s): Gary T. Forrest
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Paper Abstract

Testing of ultraviolet lasers with field portable notebook PC's is accomplished with UV SensorCards responding to wavelengths from 450 nm to 8 angstroms. Beam sizes from over 5 inches to less than one micron have been measured in applications including laser annealing of flat panel displays, multichip module via hole drilling, ink jet cartridge manufacturing, semiconductor lithography, and medical eye surgery. Both instant UV SensorCard and direct camera observation have been employed. The former offers submicron resolution over large areas. The latter offers real time (30 Hz) display and capture of images. UV diffractive beam splitters have been employed to allow simultaneous measurement of absolute laser power and beam profile; including absolute fluence measurement. Among the common problems in laser system operation revealed are beam misalignment, shot to shot spatial energy variation, deterioration of optics, and streaming due to gas impurities.

Paper Details

Date Published: 8 April 1996
PDF: 12 pages
Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); doi: 10.1117/12.237722
Show Author Affiliations
Gary T. Forrest, SensorPhysics, Inc. (United States)


Published in SPIE Proceedings Vol. 2703:
Lasers as Tools for Manufacturing of Durable Goods and Microelectronics
Jan J. Dubowski; Jyotirmoy Mazumder; Leonard R. Migliore; Chandrasekhar Roychoudhuri; Ronald D. Schaeffer, Editor(s)

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