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Proceedings Paper

Excimer laser: innovation in industrial material processing
Author(s): Dirk Basting; Heinrich Endert; Rainer Paetzel; Bernard K. Nikolaus
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Paper Abstract

Excimer lasers offer unique benefits for a wide range of applications, including industrial materials processing, scientific research and medicine. The benefits of the excimer laser stem from its high peak power output delivered in short pulses at a variety of UV wavelengths. In recent years, technical developments by laser manufacturers have lead to remarkable improvements in excimer performance, reliability and utility, as well as lower cost of ownership. As a result, the market for excimer lasers continues to grow and diversify. In this paper we examine some of the more recent advances, look at various industrial applications that are enabled by excimer lasers, and catch a glimpse of the future direction of this technology.

Paper Details

Date Published: 8 April 1996
PDF: 12 pages
Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); doi: 10.1117/12.237721
Show Author Affiliations
Dirk Basting, Lambda Physik GmbH (Germany)
Heinrich Endert, Lambda Physik GmbH (Germany)
Rainer Paetzel, Lambda Physik GmbH (Germany)
Bernard K. Nikolaus, Lambda Physik GmbH (Germany)

Published in SPIE Proceedings Vol. 2703:
Lasers as Tools for Manufacturing of Durable Goods and Microelectronics
Jan J. Dubowski; Jyotirmoy Mazumder; Leonard R. Migliore; Chandrasekhar Roychoudhuri; Ronald D. Schaeffer, Editor(s)

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