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Proceedings Paper

Durable optical coatings for energetic UV laser sources
Author(s): Ronald L. J. Cowell
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Paper Abstract

It is now possible to manufacture repeatable, high laser damage threshold coatings for use at 193 nm and 248 nm. A variety of fluoride based and oxide multilayer coatings are available on standard or custom substrates.

Paper Details

Date Published: 8 April 1996
PDF: 6 pages
Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); doi: 10.1117/12.237715
Show Author Affiliations
Ronald L. J. Cowell, Technical Optics Ltd. (United Kingdom)


Published in SPIE Proceedings Vol. 2703:
Lasers as Tools for Manufacturing of Durable Goods and Microelectronics
Jan J. Dubowski; Jyotirmoy Mazumder; Leonard R. Migliore; Chandrasekhar Roychoudhuri; Ronald D. Schaeffer, Editor(s)

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