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Proceedings Paper

Suspended YBaCuO microstructures on CeO2/YSZ membranes for sensitive bolometers
Author(s): Laurence Mechin; Jean-Claude Villegier; Daniel Bloyet
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Paper Abstract

We have succeeded in fabricating sensitive superconducting YBaCuO membrane bolometers by two original techniques on silicon and silicon-on-implanted-oxide (SIMOX) substrates. The first process is based on a silicon dry reactive ion etching (RIE) and the second on the selective SiO2 layer etching of a SIMOX substrate. On a 10 micrometers wide, 150 micrometers long 'RIE-type' suspended bridge, the best sensitivity and optical NEP are 1580 V/W and 2.10-12 W/(root)Hz respectively at 85 K, with a thermal response time of 750 microsecond(s) . These responsivity and NEP values, measured on non-optimized structures, are among the best reported for liquid nitrogen-cooled thermal detectors. In addition, very short response times in the order of 7 microsecond(s) are obtained on `SIMOX type' air-bridges.

Paper Details

Date Published: 12 April 1996
PDF: 8 pages
Proc. SPIE 2685, Photodetectors: Materials and Devices, (12 April 1996); doi: 10.1117/12.237704
Show Author Affiliations
Laurence Mechin, CEA Grenoble (France)
Jean-Claude Villegier, CEA Grenoble (France)
Daniel Bloyet, GREYC Instrumentation (France)


Published in SPIE Proceedings Vol. 2685:
Photodetectors: Materials and Devices
Manijeh Razeghi, Editor(s)

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