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Proceedings Paper

Hollow glass waveguides with CVD-deposited metal and dielectric coatings
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Paper Abstract

Hollow glass waveguides have been fabricated for the delivery of infrared radiation by chemical vapor deposition methods. A molybdenum film is first deposited inside 700- micrometer and 530-micrometer bore silica tubing by the hydrogen reduction of molybdenum chloride. Then, Al2O3, or TiO2 film is deposited onto the molybdenum layer. These dielectric films enhance the reflectivity, and we observe a reduction in loss for the thin- film combination compared with the molybdenum film alone. The thickness uniformity of the dielectric films is estimated to be less than 5% of the desired thickness in a length of 50 cm. A loss spectrum of the Al2O3/Mo-coated waveguides shows that the losses for the Al2O3 guide in the 3 - 6 micrometer wavelength region are lower than the loss for the AgI-coated guide fabricated by liquid-phase deposition technique. The chemical vapor deposition techniques can be extended to the fabrication of hollow waveguides with multiple dielectric layers that have much lower losses than current single-layer designs.

Paper Details

Date Published: 5 April 1996
PDF: 8 pages
Proc. SPIE 2677, Biomedical Fiber Optics, (5 April 1996); doi: 10.1117/12.237567
Show Author Affiliations
Yuji Matsuura, Rutgers Univ. (United States)
James A. Harrington, Rutgers Univ. (United States)


Published in SPIE Proceedings Vol. 2677:
Biomedical Fiber Optics
Abraham Katzir; James A. Harrington, Editor(s)

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