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Proceedings Paper

Phase-measuring laser feedback interferometry: applications to microscopy
Author(s): Ben Ovryn; James H. Andrews; Steven J. Eppell
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Paper Abstract

This brief proceedings paper presents an introduction to our adaptation of the principles of phase shifting interferometry to a laser feedback interferometer. The application of these methods allows a direct measurement of both the optical path length and the fringe modulation. Examination of the spatial variation of both of these quantities over an object's surface provides a quantitative map of the geometry of a sample's surface. We demonstrate that discrete phase shifting methods can be used to accurately measure optical path length changes and fringe modulation.

Paper Details

Date Published: 10 April 1996
PDF: 10 pages
Proc. SPIE 2655, Three-Dimensional Microscopy: Image Acquisition and Processing III, (10 April 1996); doi: 10.1117/12.237491
Show Author Affiliations
Ben Ovryn, NASA Lewis Research Ctr. (United States)
James H. Andrews, NASA Lewis Research Ctr. (United States)
Steven J. Eppell, Case Western Reserve Univ. (United States)


Published in SPIE Proceedings Vol. 2655:
Three-Dimensional Microscopy: Image Acquisition and Processing III
Carol J. Cogswell; Gordon S. Kino; Tony Wilson, Editor(s)

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