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Proceedings Paper

Semiconductor laser confocal and interference microscopy
Author(s): Tony Wilson; Rimas Juskaitis; Nigel P. Rea
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Paper Abstract

We describe a semiconductor laser confocal interference microscope that is capable of producing both confocal images and high resolution surface profiles. The system is based on an optical fiber interferometer together with injection current modulation. We also address the issue of resolution in phase imaging.

Paper Details

Date Published: 10 April 1996
PDF: 6 pages
Proc. SPIE 2655, Three-Dimensional Microscopy: Image Acquisition and Processing III, (10 April 1996); doi: 10.1117/12.237463
Show Author Affiliations
Tony Wilson, Univ. of Oxford (United Kingdom)
Rimas Juskaitis, Univ. of Oxford (United Kingdom)
Nigel P. Rea, Univ. of Oxford (United Kingdom)

Published in SPIE Proceedings Vol. 2655:
Three-Dimensional Microscopy: Image Acquisition and Processing III
Carol J. Cogswell; Gordon S. Kino; Tony Wilson, Editor(s)

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