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Proceedings Paper

Micromachined confocal optical microscope
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Paper Abstract

In this paper we describe a new fiber confocal optical microscopy with miniature scanner and imaging optics that is being developed for in situ imaging applications. The microscope uses torsional mirrors to accomplish the scanning. The mirrors, which are 300 X 360 micrometers and 500 X 600 micrometers , respectively, are fabricated with silicon micromachining techniques and produce a raster scan at video rates suitable for real time imaging. The objective is an off-axis grating lens and has numerical aperture of 0.25. Imaging is monochromatic at (lambda) equals 0.6328 micrometers , and the system is capable of approximately 1.0 micrometers resolution over a 100 micrometers field of view. The cross sectional dimensions of the imaging head that contains the mirrors and the lens is 1.2 X 2.5 mm. We present the microscope architecture and discuss the design parameters, the limitations, and the performance tradeoffs that were faced in developing this microscope.

Paper Details

Date Published: 10 April 1996
PDF: 7 pages
Proc. SPIE 2655, Three-Dimensional Microscopy: Image Acquisition and Processing III, (10 April 1996); doi: 10.1117/12.237462
Show Author Affiliations
David L. Dickensheets, Stanford Univ. (United States)
Gordon S. Kino, Stanford Univ. (United States)


Published in SPIE Proceedings Vol. 2655:
Three-Dimensional Microscopy: Image Acquisition and Processing III
Carol J. Cogswell; Gordon S. Kino; Tony Wilson, Editor(s)

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