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Proceedings Paper

Spatial characteristics of laser pulsed plasma deposition of thin films
Author(s): A. A. Gorbunov; Vitali I. Konov
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Paper Details

Date Published: 1 October 1990
PDF: 5 pages
Proc. SPIE 1352, 1st Intl School on Laser Surface Microprocessing, (1 October 1990); doi: 10.1117/12.23734
Show Author Affiliations
A. A. Gorbunov, Institute of General Physics (Russia)
Vitali I. Konov, Institute of General Physics (Russia)

Published in SPIE Proceedings Vol. 1352:
1st Intl School on Laser Surface Microprocessing

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