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Proceedings Paper

Surface nitride/oxynitride layers obtained by multipulse excimer laser irradiation of metal and semiconductor samples
Author(s): Gilberto Leggieri; Armando Luches; Maurizio Martino; Maria Rita Perrone; Valentin Craciun; Ion N. Mihailescu; Ioan Ursu; S. Ganatsios
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Paper Details

Date Published: 1 October 1990
PDF: 12 pages
Proc. SPIE 1352, 1st Intl School on Laser Surface Microprocessing, (1 October 1990); doi: 10.1117/12.23731
Show Author Affiliations
Gilberto Leggieri, Univ. di Lecce (Italy)
Armando Luches, Univ. di Lecce (Italy)
Maurizio Martino, Univ. di Lecce (Italy)
Maria Rita Perrone, Univ. di Lecce (Italy)
Valentin Craciun, Central Institute of Physics (Romania)
Ion N. Mihailescu, Central Institute of Physics (Romania)
Ioan Ursu, Central Institute of Physics (Romania)
S. Ganatsios, Technological and Education Institute (Greece)

Published in SPIE Proceedings Vol. 1352:
1st Intl School on Laser Surface Microprocessing

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