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Proceedings Paper

Film growth mode and related film properties in pulsed laser-plasma deposition
Author(s): Simeon Metev; Krassimira Meteva
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Paper Abstract

In the paper the results of a theoretical investigation of the growth process of laserplasma deposited thin films are discussed. A kinetic approach has been used to establish direct relation between experimental conditions (laser flux density substrate temperature) and film properties (thickness structure) . The results of some ex perimental investigations of the deposition process are presented confirming the general conclusions of the developed theoretical mo del. 1 .

Paper Details

Date Published: 1 October 1990
PDF: 9 pages
Proc. SPIE 1352, 1st Intl School on Laser Surface Microprocessing, (1 October 1990); doi: 10.1117/12.23722
Show Author Affiliations
Simeon Metev, Bremen Institute of Applied Beam Technology (Germany)
Krassimira Meteva, Bremen Institute of Applied Beam Technology (Germany)


Published in SPIE Proceedings Vol. 1352:
1st Intl School on Laser Surface Microprocessing

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