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Proceedings Paper

Positive photoresist ablation with excimer laser
Author(s): Moishe S. Kitai; Valerie L. Popkov; Vladimir A. Semchishen
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Paper Details

Date Published: 1 October 1990
PDF: 9 pages
Proc. SPIE 1352, 1st Intl School on Laser Surface Microprocessing, (1 October 1990); doi: 10.1117/12.23717
Show Author Affiliations
Moishe S. Kitai, Scientific Research Ctr. for Technological Lasers (Russia)
Valerie L. Popkov, Scientific Research Ctr. for Technological Lasers (Russia)
Vladimir A. Semchishen, Scientific Research Ctr. for Technological Lasers (Russia)


Published in SPIE Proceedings Vol. 1352:
1st Intl School on Laser Surface Microprocessing

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