Share Email Print

Proceedings Paper

Laser projection UV lithography on subliming resists
Author(s): Eduard I. Tochitsky; Anatoly I. Sharendo; Victor V. Boksha
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Details

Date Published: 1 October 1990
PDF: 8 pages
Proc. SPIE 1352, 1st Intl School on Laser Surface Microprocessing, (1 October 1990); doi: 10.1117/12.23706
Show Author Affiliations
Eduard I. Tochitsky, Institute of Electronics (Belarus)
Anatoly I. Sharendo, Institute of Electronics (Belarus)
Victor V. Boksha, Institute of Electronics (Belarus)

Published in SPIE Proceedings Vol. 1352:
1st Intl School on Laser Surface Microprocessing

© SPIE. Terms of Use
Back to Top