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Proceedings Paper

Laser projection UV lithography on subliming resists
Author(s): Eduard I. Tochitsky; Anatoly I. Sharendo; Victor V. Boksha
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Paper Details

Date Published: 1 October 1990
PDF: 8 pages
Proc. SPIE 1352, 1st Intl School on Laser Surface Microprocessing, (1 October 1990); doi: 10.1117/12.23706
Show Author Affiliations
Eduard I. Tochitsky, Institute of Electronics (Belarus)
Anatoly I. Sharendo, Institute of Electronics (Belarus)
Victor V. Boksha, Institute of Electronics (Belarus)


Published in SPIE Proceedings Vol. 1352:
1st Intl School on Laser Surface Microprocessing

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