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Proceedings Paper

Modifications of polymers under light action within transparency band
Author(s): Vladimir N. Genkin
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Paper Abstract

Some aspects of photomodification of polymer glasses and their applicability for the tasks of Xray 1ithograph are discussed. 1. Modification of dielectrics in the fields smaller than the atomic ones results from the absorption of'' light which can be linear or nonjinear and which is always present in thermodynamically balanced systems. Whatever is taking place in the substance during this process is extremely complicated and multi form and is accompanied by the change In thermodynamical characteristics (compo-- sitlon temperature pressure). I)ue to this it is suitable to classify the processes by a thermodynamical parameter which basically determines the change in the substance properties. In low absorption media (at small intensity fluxes) the heating is negli gible and only a change in composition can take place as a result of photochein ical reactions. This modification can be called photochemical. . As the absorp-- tion centres accumulate or the intensity grows the thermal processes become essential. This is a thermochemical stage [l3J. At last this is characteris-- tic of solid matrix as a result of inhomogeneous heating and local change of volume the mechanochemical processes can be brought to the fore[lJ. This very classification will be used below in the study of the polymer modification. It is obvious that the results of the photomodification investigation can be used for creating optical technology in particular in submicron lithograph where polymers are widely used for

Paper Details

Date Published: 1 October 1990
PDF: 9 pages
Proc. SPIE 1352, 1st Intl School on Laser Surface Microprocessing, (1 October 1990); doi: 10.1117/12.23704
Show Author Affiliations
Vladimir N. Genkin, Institute of Applied Physics (Russia)


Published in SPIE Proceedings Vol. 1352:
1st Intl School on Laser Surface Microprocessing

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