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Proceedings Paper

UV laser photolysis of Mo(CO)6 and molybdenum film deposition
Author(s): Victor N. Bagratashvili; Alexander V. Evseev; Sergey Valentinov Kamayev; Michael A. Markov
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Paper Details

Date Published: 1 October 1990
PDF: 7 pages
Proc. SPIE 1352, 1st Intl School on Laser Surface Microprocessing, (1 October 1990); doi: 10.1117/12.23703
Show Author Affiliations
Victor N. Bagratashvili, Research Ctr. for Laser Technology (Russia)
Alexander V. Evseev, Research Ctr. for Laser Technology (Russia)
Sergey Valentinov Kamayev, Research Ctr. for Laser Technology (Russia)
Michael A. Markov, Research Ctr. for Laser Technology (Russia)


Published in SPIE Proceedings Vol. 1352:
1st Intl School on Laser Surface Microprocessing

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