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Proceedings Paper

Micromechanical ultrasonic transducer for liquid nebulization
Author(s): Roumiana Paneva
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Paper Abstract

A piezoelectric ZnO layer is used to set thin silicon membrane into vibrations. The possibility to apply this micromechanical structure as an ultrasonic transducer is studied. High vibration modes are characterized with a considerable ultrasonic radiation. The application of the structure for ultrasonic nebulization is discussed.

Paper Details

Date Published: 26 April 1996
PDF: 6 pages
Proc. SPIE 2779, 3rd International Conference on Intelligent Materials and 3rd European Conference on Smart Structures and Materials, (26 April 1996); doi: 10.1117/12.237026
Show Author Affiliations
Roumiana Paneva, Univ. Erlangen-Nuernberg (Germany)


Published in SPIE Proceedings Vol. 2779:
3rd International Conference on Intelligent Materials and 3rd European Conference on Smart Structures and Materials
Pierre Francois Gobin; Jacques Tatibouet, Editor(s)

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