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Proceedings Paper

Piezoelectric and electrostrictive bimorph actuators and sensors for smart microsystems
Author(s): Philippe Gaucher
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Paper Abstract

Piezoelectric materials (PZ-PT 50-50, PMN-PT 65-35) and electrostrictive materials (PMN- PT 90-10) are potential candidates for the future integrated micro-systems because of their high dielectric constant and elastic modulus. They can be used in a cantilever laminated structure for active vibration control, smart acoustic sensors and agile transducers. The first stage of the study has been made with screen printed thick films: modeling of transfer functions of sensor and actuator is made by analytical methods and experimentation of closed loop regulation is shown on a 15 mm long device. The second stage is the miniaturization of the device on silicon substrate by using sol-gel deposition, microlithography and wet etching. The modeling of a 10 times smaller device is made with data coming from experimental measurements on thin films. Expected deviations and sensitivities are calculated with the same model as above.

Paper Details

Date Published: 26 April 1996
PDF: 6 pages
Proc. SPIE 2779, 3rd International Conference on Intelligent Materials and 3rd European Conference on Smart Structures and Materials, (26 April 1996); doi: 10.1117/12.237025
Show Author Affiliations
Philippe Gaucher, Thomson-CSF (France)


Published in SPIE Proceedings Vol. 2779:
3rd International Conference on Intelligent Materials and 3rd European Conference on Smart Structures and Materials

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