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Proceedings Paper

Excimer laser assisted etching of silicon surface in electronegative gases
Author(s): Vladimir G. Ageev; Vitali I. Konov; Andrey I. Krechetov; A. V. Kuzmichov; Alexander M. Prokhorov
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Paper Details

Date Published: 1 October 1990
PDF: 13 pages
Proc. SPIE 1352, 1st Intl School on Laser Surface Microprocessing, (1 October 1990); doi: 10.1117/12.23694
Show Author Affiliations
Vladimir G. Ageev, General Physics Institute (Russia)
Vitali I. Konov, Instiutute of General Physics (Russia)
Andrey I. Krechetov, Institute of General Physics (Russia)
A. V. Kuzmichov, Institute of General Physics (Russia)
Alexander M. Prokhorov, Institute of General Physics (Russia)

Published in SPIE Proceedings Vol. 1352:
1st Intl School on Laser Surface Microprocessing

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