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Proceedings Paper

Dark-field optical microscopy in semiconductor materials: a typical answerable inverse problem
Author(s): Jean-Pierre Fillard; Paul C. Montgomery; Syamsa Moh Ardisasmita; Pascal Gall-Borrut
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Paper Abstract

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Paper Details

Date Published: 1 November 1990
PDF: 8 pages
Proc. SPIE 1351, Digital Image Synthesis and Inverse Optics, (1 November 1990); doi: 10.1117/12.23630
Show Author Affiliations
Jean-Pierre Fillard, Ctr. d'Electronique de Montpel (France)
Paul C. Montgomery, Ctr. d'Electronique de Montpel (France)
Syamsa Moh Ardisasmita, Ctr. d'Electronique de Montpel (France)
Pascal Gall-Borrut, Ctr. d'Electronique de Montpel (France)

Published in SPIE Proceedings Vol. 1351:
Digital Image Synthesis and Inverse Optics
Arthur F. Gmitro; Paul S. Idell; Ivan J. LaHaie, Editor(s)

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