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Proceedings Paper

Combined split-cell and linear position-sensing diodes
Author(s): Evan D. Green; Ernie B. Evans
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Paper Abstract

By fabricating a discrete cell photodiode with multiple edge contacts, and allowing for operation under two different current sensing schemes, a diode which operates optionally as either a continuous or discrete cell position sensitive photodetector has been realized. Inclusion of on-chip CMOS switching circuitry enables a user of such a photodetector to change its operating mode by the use of a single digital input line. Experimental results of the dual mode photodiode with switching circuitry are presented in this paper.

Paper Details

Date Published: 25 March 1996
PDF: 9 pages
Proc. SPIE 2686, Integrated Optics and Microstructures III, (25 March 1996); doi: 10.1117/12.236143
Show Author Affiliations
Evan D. Green, San Jose State Univ. (United States)
Ernie B. Evans, Tencor Instruments (United States)


Published in SPIE Proceedings Vol. 2686:
Integrated Optics and Microstructures III
Massood Tabib-Azar, Editor(s)

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