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Proceedings Paper

Integrated ATR-leaky waveguide-mode sensor head fabricated by laser beam etching
Author(s): Stefan Nischwitz; Tomas R. Sterkenburgh; Hilmar Franke
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Paper Abstract

Starting with a piece of PMMA (2 mm by 2 cm by 5 cm) a pattern for an integrated version of an optical gas sensor is recorded using computer controlled carbon dioxide laser beam etching. The sensor principle is the ATR-leaky mode spectroscopy using the shift of the plasmon resonance. Divergent light is created by optical fiber coupling. The resonance shift is observed with an array detector.

Paper Details

Date Published: 25 March 1996
PDF: 8 pages
Proc. SPIE 2686, Integrated Optics and Microstructures III, (25 March 1996); doi: 10.1117/12.236139
Show Author Affiliations
Stefan Nischwitz, Gerhard-Mercator Univ. Duisburg (Germany)
Tomas R. Sterkenburgh, Gerhard-Mercator Univ. Duisburg (Germany)
Hilmar Franke, Gerhard-Mercator Univ. Duisburg (Germany)


Published in SPIE Proceedings Vol. 2686:
Integrated Optics and Microstructures III
Massood Tabib-Azar, Editor(s)

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