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Proceedings Paper

Optical microspectrometer in SiON slab waveguides
Author(s): Dietmar Sander; M.-O. Duecker; O. Blume; Joerg Mueller
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Paper Abstract

An integrated microspectrometer is presented using SiON-slab waveguides on silicon substrates. The microspectrometer is utilized as a versatile detection unit of micro total analysis systems by broad band VIS-spectroscopy. It is designed for efficient diffraction in the wavelength range between 300 - 700 nm, a high spectral resolution and dispersion, respectively. The spectrometer consists of a planar 5 by 5 mm2 transmission grating, a cylindric lens and a commercial silicon diode array positioned in its focus for simultaneous intensity detection of the complete visible spectrum. No moving parts and a compact optical sensor head enable mobile use free of maintenance.

Paper Details

Date Published: 25 March 1996
PDF: 8 pages
Proc. SPIE 2686, Integrated Optics and Microstructures III, (25 March 1996); doi: 10.1117/12.236128
Show Author Affiliations
Dietmar Sander, Technische Univ. Hamburg-Harburg (Germany)
M.-O. Duecker, Technische Univ. Hamburg-Harburg (Germany)
O. Blume, Technische Univ. Hamburg-Harburg (Germany)
Joerg Mueller, Technische Univ. Hamburg-Harburg (Germany)

Published in SPIE Proceedings Vol. 2686:
Integrated Optics and Microstructures III
Massood Tabib-Azar, Editor(s)

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