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Proceedings Paper

Silicon integrated optic devices and micromechanical sensors based on ARROW
Author(s): Arokia Nathan; Kamel Benaissa
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Paper Abstract

We review the design and fabrication considerations of the antiresonant reflecting optical waveguide (AR-ROW), including materials selection for IC and MEMS compatibility, and present a variety of IO devices and sensors based on the ARROW which we have developed, along with pertinent CAD tools. Examples presented include: directional couplers, thermo- optic modulators, and Mach-Zehnder interferometers (MZI), including micromachined MZIs for detection of mechanical signals.

Paper Details

Date Published: 25 March 1996
PDF: 15 pages
Proc. SPIE 2686, Integrated Optics and Microstructures III, (25 March 1996); doi: 10.1117/12.236125
Show Author Affiliations
Arokia Nathan, Univ. of Waterloo (Canada)
Kamel Benaissa, Univ. of Waterloo (Canada)


Published in SPIE Proceedings Vol. 2686:
Integrated Optics and Microstructures III
Massood Tabib-Azar, Editor(s)

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