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Proceedings Paper

High-quality surface measurements using the Gabor expansion
Author(s): Michael Friedmann; Tuvia Kotzer; Joseph Shamir
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Paper Abstract

This work describes a new optical inspection method, based on the investigation of the combined space-frequency representation of the scattered field. Samples of the sliding window spectrum are measured optically, and then are processed using modern signal processing techniques, like signal reconstruction from Gabor expansion coefficients using the Zak transform, and phase recovery from amplitude only data, using projection onto constraints set algorithm. Computer simulations and experimental results show that the new method is capable to describe accurately very shallow phase objects, even when their dimensions are smaller than the diffraction limit of the optical setup.

Paper Details

Date Published: 11 March 1996
PDF: 9 pages
Proc. SPIE 2651, Liquid Crystal Materials, Devices, and Applications IV, (11 March 1996); doi: 10.1117/12.235344
Show Author Affiliations
Michael Friedmann, Technion--Israel Institute of Technology (Israel)
Tuvia Kotzer, Technion--Israel Institute of Technology (Israel)
Joseph Shamir, Technion--Israel Institute of Technology (Israel)

Published in SPIE Proceedings Vol. 2651:
Liquid Crystal Materials, Devices, and Applications IV
Ranganathan Shashidhar, Editor(s)

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