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Proceedings Paper

Magnetically actuated MEMS scanning mirror
Author(s): Raanan A. Miller; Geoffrey W. Burr; Yu-Chong Tai; Demetri Psaltis
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Paper Abstract

A 4 mm by 5 mm, magnetically actuated scanning MEMS mirror is fabricated by integration of bulk silicon micromachining and magnetic thin film head techniques. Large mirror deflection angles (0 - 70 degree(s)) are achieved. The MEMS mirror is demonstrated as a laser beam scanner in both conventional and compact holographic data storage system configurations.

Paper Details

Date Published: 8 March 1996
PDF: 6 pages
Proc. SPIE 2687, Miniaturized Systems with Micro-Optics and Micromechanics, (8 March 1996); doi: 10.1117/12.234635
Show Author Affiliations
Raanan A. Miller, California Institute of Technology (United States)
Geoffrey W. Burr, California Institute of Technology (United States)
Yu-Chong Tai, California Institute of Technology (United States)
Demetri Psaltis, California Institute of Technology (United States)


Published in SPIE Proceedings Vol. 2687:
Miniaturized Systems with Micro-Optics and Micromechanics
M. Edward Motamedi, Editor(s)

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