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Proceedings Paper

Monolithically integrated refractive microlens standing perpendicular to the substrate
Author(s): Charles King; Lih-Yuan Lin; Ming C. Wu
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Paper Abstract

We report the first fabrication of a spherical microlens monolithically integrated on a surface- micromachined supporting plate standing perpendicular to the substrate. The focusing and collimating abilities of the lens are successfully demonstrated.

Paper Details

Date Published: 8 March 1996
PDF: 8 pages
Proc. SPIE 2687, Miniaturized Systems with Micro-Optics and Micromechanics, (8 March 1996); doi: 10.1117/12.234631
Show Author Affiliations
Charles King, Univ. of California/Los Angeles (United States)
Lih-Yuan Lin, Univ. of California/Los Angeles (United States)
Ming C. Wu, Univ. of California/Los Angeles (United States)


Published in SPIE Proceedings Vol. 2687:
Miniaturized Systems with Micro-Optics and Micromechanics
M. Edward Motamedi, Editor(s)

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