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Proceedings Paper

Novel method for making parabolic grating
Author(s): Bo Chen; Lurong Guo; Jiyue Tang; Ping Xu; Ming-bao Zhou
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Paper Abstract

We introduce the moving-mask method for fabrication of continuous relief grating with parabolic section profile in this paper. The depth of the grating is nearly equal to 4 micrometers , the diffraction orders from -10 to 10 has uniform intensity, such a grating can be used as multi-splitter. The grating can be concave or convex. The method presented in this paper is not only used to fabricate parabolic grating, but also has been used to generate other continuous relief patterns with line-symmetry and rotation-symmetry. Interesting experimental results are given. It is proved that this method is useful for the making of microoptics elements with continuous relief.

Paper Details

Date Published: 8 March 1996
PDF: 8 pages
Proc. SPIE 2687, Miniaturized Systems with Micro-Optics and Micromechanics, (8 March 1996); doi: 10.1117/12.234627
Show Author Affiliations
Bo Chen, Sichuan Univ. (China)
Lurong Guo, Sichuan Univ. (China)
Jiyue Tang, Sichuan Univ. (China)
Ping Xu, Sichuan Univ. (China)
Ming-bao Zhou, Academia Sinica (Taiwan)


Published in SPIE Proceedings Vol. 2687:
Miniaturized Systems with Micro-Optics and Micromechanics
M. Edward Motamedi, Editor(s)

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