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Proceedings Paper

Design and fabrication issues in the development of monolithic micro-optical systems
Author(s): Charles M. Egert; Slobodan Rajic
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Paper Abstract

The micro-sensor field is presently proliferating with designs and approaches. We have recently been involved with several mini/micro optical systems which have pointed out several trends in design and fabrication that are somewhat more important to these smaller optical systems. These include; material choices, alignment strategies, fabrication methods, and freedom and complexity of the optical designs. Our recent experience indicates that since mini/micro optical systems are likely to be produced in much higher number, that traditional fabrication methods could prove exorbitantly expensive. Deterministic fabrication methods employing inherently self-aligning features are well worth investigating. This is particularly true for monolithic systems that fall into that `grey' area between mini and truly micro optical systems.

Paper Details

Date Published: 8 March 1996
PDF: 9 pages
Proc. SPIE 2687, Miniaturized Systems with Micro-Optics and Micromechanics, (8 March 1996); doi: 10.1117/12.234624
Show Author Affiliations
Charles M. Egert, Oak Ridge National Lab. (United States)
Slobodan Rajic, Oak Ridge National Lab. (United States)

Published in SPIE Proceedings Vol. 2687:
Miniaturized Systems with Micro-Optics and Micromechanics
M. Edward Motamedi, Editor(s)

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