Share Email Print
cover

Proceedings Paper

Plane and concave VUV and soft x-ray multilayered mirrors
Author(s): Jianlin Cao; Tongqun Miao; Longsheng Qian; Xioufang Zhu; Futian Li; Yueying Ma; Limin Qian; Bo Chen; Xingdan Chen
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The current works and efforts of the authors for making muLtiLayered ptane and concave mirrors in VUV and soft x-ray region are described. These incLude the principLe of seLecting coating materiaLs and optimum design the fabrication of substrates the deposition using eectron beam evaporation the test and evatuation of performance and the preparation of faciLities. 1 .

Paper Details

Date Published: 1 January 1991
PDF: 8 pages
Proc. SPIE 1345, Advanced X-Ray/EUV Radiation Sources and Applications, (1 January 1991); doi: 10.1117/12.23316
Show Author Affiliations
Jianlin Cao, Changchun Institute of Optics and Fine Mechanics (China)
Tongqun Miao, Changchun Institute of Optics and Fine Mechanics (China)
Longsheng Qian, Changchun Institute of Optics and Fine Mechanics (China)
Xioufang Zhu, Changchun Institute of Optics and Fine Mechanics (China)
Futian Li, Changchun Institute of Optics and Fine Mechanics (China)
Yueying Ma, Changchun Institute of Optics and Fine Mechanics (China)
Limin Qian, Changchun Institute of Optics and Fine Mechanics (China)
Bo Chen, Changchun Institute of Optics and Fine Mechanics (China)
Xingdan Chen, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 1345:
Advanced X-Ray/EUV Radiation Sources and Applications
James P. Knauer; Gopal K. Shenoy, Editor(s)

© SPIE. Terms of Use
Back to Top