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Proceedings Paper

Three materials soft x-ray mirrors: theory and application
Author(s): Pierre Boher; Louis Hennet; Philippe Houdy
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Paper Abstract

A periodic structure alternating three different materials has been investigated and fabricated using a diode RF-sputtering system. Reflectivity was optimized using the wave propagation method. It is concluded that the amorphous character of the rhodium layers is enhanced in the W/Rh/C structures, and good reflectivities have been obtained at the carbon K-alpha line with trilayer structures including a great number of periods (28 percent of reflectivity for 40 periods stack). Some reduction of the boron interdiffusion is observed in the W/Rh/C structures, which leads to better soft X-ray performances at the boron K-alpha line (19 percent of reflectivity for a 40 periods stack).

Paper Details

Date Published: 1 January 1991
PDF: 15 pages
Proc. SPIE 1345, Advanced X-Ray/EUV Radiation Sources and Applications, (1 January 1991); doi: 10.1117/12.23315
Show Author Affiliations
Pierre Boher, Labs. d'Electronique Philips (France)
Louis Hennet, Labs. d'Electronique Philips (France)
Philippe Houdy, Labs. d'Electronique Philips (France)

Published in SPIE Proceedings Vol. 1345:
Advanced X-Ray/EUV Radiation Sources and Applications
James P. Knauer; Gopal K. Shenoy, Editor(s)

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