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Proceedings Paper

Lateral-periodicity evaluation of multilayer Bragg reflector surface roughness using x-ray diffraction
Author(s): Hisataka Takenaka; Yoshikazu Ishii
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Paper Details

Date Published: 1 January 1991
PDF: 9 pages
Proc. SPIE 1345, Advanced X-Ray/EUV Radiation Sources and Applications, (1 January 1991); doi: 10.1117/12.23313
Show Author Affiliations
Hisataka Takenaka, NTT Corp. (Japan)
Yoshikazu Ishii, NTT Corp. (Japan)


Published in SPIE Proceedings Vol. 1345:
Advanced X-Ray/EUV Radiation Sources and Applications
James P. Knauer; Gopal K. Shenoy, Editor(s)

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